Semiconductor Ultrapure Water Equipment

Product introduction

Zhongnuo Water Treatment provides professional electronic-grade ultrapure water system solutions for the semiconductor industry. Targeting the extreme water quality requirements of chip manufacturing, wafer processing, integrated circuits, advanced packaging and other high-end electronics manufacturing, we adopt full-process precision treatment technology of "pretreatment + double-pass RO + EDI + polishing mixed bed + terminal UF + degas membrane", stably producing ultrapure water with 18.2MΩ·cm resistivity.

Our semiconductor UPW systems strictly follow SEMI standards, effectively controlling key indicators such as ions, particles, TOC, metals, bacteria, dissolved oxygen, meeting water requirements for 14nm and below advanced process nodes, ensuring chip yield and product reliability, providing stable and reliable ultrapure water supply for semiconductor manufacturers.

Application industry: IC Manufacturing: Wafer cleaning, lithography, etching, CMP process water， Semiconductor Devices: Diodes, transistors, power device manufacturing， Advanced Packaging: WLP, flip chip, TSV packaging processes，

Quantity:

Inquire

Product details

Ultrapure water equipment process flow:

(1) Pretreatment + dual-stage reverse osmosis + electro-deionization + polishing mixed bed

(2) Pretreatment + single-stage reverse osmosis + electro-deionization

(3) Pretreatment + single-stage reverse osmosis + regeneration mixed bed

Ultrapure water equipment process flow.png

Ultrapure Water Equipment Performance

Introduction:

(1) The ultrapure water equipment's reverse osmosis system is fully automatic, using Chinese-made components, ensuring high stability and simple, convenient operation.

(2) The ultrapure water equipment is equipped with a dedicated concentrate regulating valve for easy operation.

(3) The ultrapure water equipment is equipped with ultraviolet light and membrane filters to prevent bacteria from affecting the EDI and water quality.

(4) Through professional technology, the ultrapure water equipment ensures stable water quality during short-term or long-term shutdowns of the EDI system.

(5) The ultrapure water equipment uses original, top-tier Chinese brand EDI membrane stacks, offering stable performance, long service life, and continuous, stable, and unfluctuating effluent quality. Its patented "fully filled" concentrate chamber eliminates the need for salt addition and concentrate circulation.

(6) The EDI flow meter in the ultrapure water equipment uses a magnetic induction float flow meter, preventing damage to the membrane stack caused by concentrate channel blockage or other equipment malfunctions resulting in no concentrate production.

(7) The ultrapure water equipment has multiple safety functions, including water shortage protection and high/low pressure protection.

(8) All controls of the ultrapure water equipment are fully automatic, and the main components are imported, ensuring high stability and simple, convenient operation.

(9) The main electrical components of the ultrapure water equipment are from leading Chinese brands, guaranteeing quality and quantity, and are designed with optimal configuration.